Seminar on FS-FTS: an innovation of fast tool servo for fabrication of large-area microoptics



Prof. Wei GAO


29 December 2017 (Friday)









Wei Gao received his Bachelor of Precision Instrumentation from Shanghai Jiao Tong University, China, in 1986, followed by MSc and Ph. D from Tohoku University, Japan, in 1991 and 1994, respectively. He is currently a professor and the director of Research Center for Precision Nanosystems, Department of Finemechanics of Tohoku University. He research interests lie primarily in the field of precision engineering, specialized in precision metrology and micro/nano-metrology. He and his group have developed a number of surface form measurement systems  as  well  as  a couple of optical sensor technologies for precision measurement and nanometrology. He is a fellow of the International Academy for Production Engineering (CIRP), the International Society for Nanomanufacturing (ISNM), and the Japan Society for Precision Engineering (JSPE). He serves as the Chairman of The Scientific Technical Committee Precision Engineering and Metrology of CIRP and also served as a Vice President of JSPE in 2015. He is the author of the book “Precision Nanometrology” (Springer). He and his group have won five Paper Awards from JSPE.


A force sensor-integrated fast tool servo, which is referred to as the FS-FTS, has been invented in Tohoku University. In addition to its fabrication function of fast tool servo diamond cutting, the FS-FTS can be employed as a force controlled stylus probe, whose working principle is analogous to a scanning force microscope, to evaluate the dimensions/forms of the fabricated microstructured surface. In combination of the fabrication and metrology functions of FS-FTS, a number of innovated and unique technologies have been developed for fabrication and evaluation of large-area microoptics, including precision tool setting for fabrication of microstructure arrays, detection and repair of defected microstructures, on-machine measurement edge profiles of diamond cutting tools, etc. This talk will provide an overview of the FS-FTS and its applications.

Enquiry: Ms Lesley Ho (office: 2766 6583,