Seminar on “Excimer lasers drive industrial applications”

Dr Burkhard Fechner

Coherent LaserSystems GmbH & Co. KG,

37079 Goettingen, Hans-Boeckler-Str. 12, Germany


Date: 12/12/2013 (Thursday)

Time: 3:00 – 5:00p.m.

Venue: Room EF619


Excimer lasers are preferred UV technology when it comes to high-performance micro-structuring with unsurpassed quality and process repeatability in applications such as drilling advanced ink jet nozzles or patterning biomedical sensor structures. Moreover, in recent years pulsed laser deposition has made it to the industrial production floor. Owing to the inherent energy and power scalability of UV excimer lasers, a wide range of operation parameters is available and matches the diverse industrial precision machining tasks. State-of-the art industrial excimer lasers feature long and short term pulse energy stability which is typically better than 0.5%, rms and is basically independent of repetition rate and output energy. Such output stability levels are unachievable by frequency converted UV technologies and are a prerequisite to achieving the accuracy and repeatability needed in UV laser mass manufacturing.